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Coriolis mass flow sensor

C2V is the MEMS development partner for the QUANTIM™ mass flow controller of Brooks Instrument, a US based company and part of Emerson Process Management. This product is the smallest commercial Coriolis mass flow controller available, for which the miniaturization enabled unprecedented accuracy at low flows, and the scaling down required a disruptive innovation.
The new sensor - the QUANTIM™ mass flow controller - virtually eliminates the application dependency of traditional low-flow control devices. The advantage of measuring through the Coriolis effect is that it measures actual, rather than derived, mass flow regardless of the form of the mass.
Packaged in a miniaturized configuration, this new device will handle many of the low flow gas, liquid and vapour applications currently being accommodated with thermal mass flow devices. Several version of the QUANTIM™ flow controller, have been taken into production by Brooks, and are available on the market (www.qauntim.com). Microsystem technology adds value to the product by enabling higher performance at lower costs, and has opened new markets and increased potential market penetration for Brooks Instrument

coriolis mass flow sensor

Typical Specifications (liquid)

  • Flow ranges: 0.14-14 kg/ hr
  • Min. flow: 0.001 kg/hr
  • Accuracy: ± 0.5%
  • Max. P.: 100 bar
  • Max T.: 65 C

Typical Applications

  • Flow ranges: 0.14-14 kg/ hr
  • Min. flow: 0.001 kg/hr
  • Accuracy: ± 0.5%
  • Max. P.: 100 bar
  • Max T.: 65 C