C2V is the MEMS development partner for the QUANTIM mass flow
controller of Brooks Instrument, a US based company and part of Emerson
Process Management. This product is the smallest commercial Coriolis mass
flow controller available, for which the miniaturization enabled unprecedented
accuracy at low flows, and the scaling down required a disruptive innovation.
The new sensor - the QUANTIM mass flow controller - virtually eliminates
the application dependency of traditional low-flow control devices. The
advantage of measuring through the Coriolis effect is that it measures
actual, rather than derived, mass flow regardless of the form of the mass.
Packaged in a miniaturized configuration, this new device will handle
many of the low flow gas, liquid and vapour applications currently being
accommodated with thermal mass flow devices. Several version of the QUANTIM
flow controller, have been taken into production by Brooks, and are available
on the market (www.qauntim.com). Microsystem technology adds value to
the product by enabling higher performance at lower costs, and has opened
new markets and increased potential market penetration for Brooks Instrument
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